Kullberg, R. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX. SPIE Digital Library.
Chicago Style (17th ed.) CitationKullberg, Richard. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX. SPIE Digital Library.
MLA (8th ed.) CitationKullberg, Richard. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.