Behringer, U. 25th European Mask and Lithography Conference. SPIE Digital Library.
Chicago Style (17. basım) AtıfBehringer, Uwe. 25th European Mask and Lithography Conference. SPIE Digital Library.
MLA (8th ed.) AtıfBehringer, Uwe. 25th European Mask and Lithography Conference. SPIE Digital Library.
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