Metrology, Inspection, and Process Control for Microlithography XXII
| Altres autors: | |
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| Format: | Electrònic Llibre |
| Idioma: | English |
| Publicat: |
SPIE Digital Library,
4/28/08
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| Matèries: | |
| Accés en línia: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
| Descripció de l’ítem: | <strong>On-Campus Access Only (IP based access)</strong> |
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| Descripció física: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9780819471079 |
| Accés: | Electronic access restricted to authorized BRAC University faculty, staff and students |