Hartzell, A. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
Cita Chicago (17th ed.)Hartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
Cita MLA (8th ed.)Hartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.