Tan, H. H. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
Chicago Style (17. basım) AtıfTan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
MLA (8th ed.) AtıfTan, Hark Hoe. Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV. SPIE Digital Library.
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