Behringer, U. 24th European Mask and Lithography Conference. SPIE Digital Library.
Cita Chicago (17th ed.)Behringer, Uwe. 24th European Mask and Lithography Conference. SPIE Digital Library.
Cita MLA (8th ed.)Behringer, Uwe. 24th European Mask and Lithography Conference. SPIE Digital Library.
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