Archie, C. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.
Cita Chicago (17th ed.)Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.
Cita MLA (8th ed.)Archie, Charles. Metrology, Inspection, and Process Control for Microlithography XXI. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.