Hartzell, A. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Hartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI. SPIE Digital Library.
MLA(8版)引用形式Hartzell, Allyson. Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI. SPIE Digital Library.
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