APA (7th ed.) Citation

Maher, M. A. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Maher, Mary Ann. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.

MLA (8th ed.) Citation

Maher, Mary Ann. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.