Maher, M. A. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
Chicago-viite (17. p.)Maher, Mary Ann. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
MLA-viite (8. p.)Maher, Mary Ann. Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. SPIE Digital Library.
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