APA (7th ed.) Citation

Wong, A. Design and Process Integration for Microelectronic Manufacturing IV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Wong, Alfred. Design and Process Integration for Microelectronic Manufacturing IV. SPIE Digital Library.

MLA (8th ed.) Citation

Wong, Alfred. Design and Process Integration for Microelectronic Manufacturing IV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.