Komuro, M. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.
Cita Chicago (17th ed.)Komuro, Masanori. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.
Cita MLA (8th ed.)Komuro, Masanori. Photomask and Next-Generation Lithography Mask Technology XII. SPIE Digital Library.
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