Wong, A. K. K. Optical Imaging in Projection Microlithography. SPIE Digital Library.
Chicago Style (17th ed.) CitationWong, Alfred K. K. Optical Imaging in Projection Microlithography. SPIE Digital Library.
MLA (8th ed.) CitationWong, Alfred K. K. Optical Imaging in Projection Microlithography. SPIE Digital Library.
Warning: These citations may not always be 100% accurate.