Metrology, Inspection, and Process Control for Microlithography XIX
| Other Authors: | |
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| Format: | Electronic Book |
| Language: | English |
| Published: |
SPIE Digital Library,
5/10/05
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| Subjects: | |
| Online Access: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
| Item Description: | <strong>On-Campus Access Only (IP based access)</strong> |
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| Physical Description: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9780819457325 |
| Access: | Electronic access restricted to authorized BRAC University faculty, staff and students |