Behringer, U. 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Chicago Style (17. basım) AtıfBehringer, Uwe. 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
MLA (8th ed.) AtıfBehringer, Uwe. 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
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