Liebmann, L. Design and Process Integration for Microelectronic Manufacturing II. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Liebmann, Lars. Design and Process Integration for Microelectronic Manufacturing II. SPIE Digital Library.
Citatione MLA (8a ed.)Liebmann, Lars. Design and Process Integration for Microelectronic Manufacturing II. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.