APA (7th ed.) Citation

Mackay, R. S. Emerging Lithographic Technologies VIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Mackay, R. Scott. Emerging Lithographic Technologies VIII. SPIE Digital Library.

MLA (8th ed.) Citation

Mackay, R. Scott. Emerging Lithographic Technologies VIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.