Janson, S. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Janson, Siegfried. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.
MLA(8版)引用形式Janson, Siegfried. MEMS/MOEMS Components and Their Applications. SPIE Digital Library.
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