Maher, M. A. Micromachining and Microfabrication Process Technology IX. SPIE Digital Library.
Chicago Style aipamenaMaher, Mary Ann. Micromachining and Microfabrication Process Technology IX. SPIE Digital Library.
MLA aipamenaMaher, Mary Ann. Micromachining and Microfabrication Process Technology IX. SPIE Digital Library.
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