Kley, E. Lithographic and Micromachining Techniques for Optical Component Fabrication II. SPIE Digital Library.
Cita Chicago (17th ed.)Kley, Ernst-Bernhard. Lithographic and Micromachining Techniques for Optical Component Fabrication II. SPIE Digital Library.
Cita MLA (8th ed.)Kley, Ernst-Bernhard. Lithographic and Micromachining Techniques for Optical Component Fabrication II. SPIE Digital Library.
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