MOEMS: Micro-Opto-Electro-Mechanical Systems

MOEMS: Micro-Opto-Electro-Mechanical Systems

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Бібліографічні деталі
Автор:	Motamedi, Manouchehr
Формат:	Електронний ресурс Книга
Мова:	English
Опубліковано:	SPIE Digital Library, 1/1/05
Предмети:	Conference papers and proceedings.
Онлайн доступ:	Full text available on Research4Life (SPIE Digital Library)
Classic Catalogue:	View this record in Classic Catalogue

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MOEMS: Micro-Opto-Electro-Mechanical Systems
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