Tanabe, H. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.
Cita Chicago (17th ed.)Tanabe, Hiroyoshi. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.
Cita MLA (8th ed.)Tanabe, Hiroyoshi. Photomask and Next-Generation Lithography Mask Technology X. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.