Behringer, U. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Cita Chicago (17th ed.)Behringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
Cita MLA (8th ed.)Behringer, Uwe. 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.
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