Courtois, B. Design, Test, Integration, and Packaging of MEMS/MOEMS 2002. SPIE Digital Library.
Cita Chicago (17th ed.)Courtois, Bernard. Design, Test, Integration, and Packaging of MEMS/MOEMS 2002. SPIE Digital Library.
Cita MLA (8th ed.)Courtois, Bernard. Design, Test, Integration, and Packaging of MEMS/MOEMS 2002. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.