APA (7th ed.) Citation

Fedynyshyn, T. Advances in Resist Technology and Processing XIX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Fedynyshyn, Theodore. Advances in Resist Technology and Processing XIX. SPIE Digital Library.

MLA (8th ed.) Citation

Fedynyshyn, Theodore. Advances in Resist Technology and Processing XIX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.