Duparré, A. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II. SPIE Digital Library.
Cita Chicago (17th ed.)Duparré, Angela. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II. SPIE Digital Library.
Cita MLA (8th ed.)Duparré, Angela. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II. SPIE Digital Library.
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