MEMS Design, Fabrication, Characterization, and Packaging

MEMS Design, Fabrication, Characterization, and Packaging

Bibliographische Detailangaben
Weitere Verfasser:	Behringer, Uwe
Format:	Elektronisch Buch
Sprache:	English
Veröffentlicht:	SPIE Digital Library, 4/30/01
Schlagworte:	Conference papers and proceedings.
Online Zugang:	Full text available on Research4Life (SPIE Digital Library)
Classic Catalogue:	View this record in Classic Catalogue

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