APA (7th ed.) Citation

Behringer, U. 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Behringer, Uwe. 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.

MLA (8th ed.) Citation

Behringer, Uwe. 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.