APA (7th ed.) Citation

Houlihan, F. Advances in Resist Technology and Processing XVIII. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Houlihan, Francis. Advances in Resist Technology and Processing XVIII. SPIE Digital Library.

MLA (8th ed.) Citation

Houlihan, Francis. Advances in Resist Technology and Processing XVIII. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.