Sullivan, N. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.
Chicago (17e ed.) BronvermeldingSullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.
MLA (8e ed.) BronvermeldingSullivan, Neal. Metrology, Inspection, and Process Control for Microlithography XV. SPIE Digital Library.
Let op: Deze citaties zijn niet altijd 100% accuraat.