Resolution Enhancement Techniques in Optical Lithography
| Hovedforfatter: | |
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| Format: | Electronisk Bog |
| Sprog: | English |
| Udgivet: |
SPIE Digital Library,
1/1/01
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| Fag: | |
| Online adgang: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
| Emne beskrivelse: | <strong>On-Campus Access Only (IP based access)</strong> |
|---|---|
| Fysisk beskrivelse: | 1 online resource |
| Format: | Mode of access: Internet |
| ISBN: | 9780819439956 9780819478818 |
| Adgang: | Electronic access restricted to authorized BRAC University faculty, staff and students |