Functional Integration of Opto-Electro-Mechanical Devices and Systems
| Altres autors: | Descour, Michael |
|---|---|
| Format: | Electrònic Llibre |
| Idioma: | English |
| Publicat: |
SPIE Digital Library,
5/15/01
|
| Matèries: | |
| Accés en línia: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
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- Micro-Opto-Electro-Mechanical Systems
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MOEMS: Micro-Opto-Electro-Mechanical Systems
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