Cita APA (7th ed.)

Karam, J. M. Micromachining and Microfabrication Process Technology VI. SPIE Digital Library.

Cita Chicago (17th ed.)

Karam, Jean Michel. Micromachining and Microfabrication Process Technology VI. SPIE Digital Library.

Cita MLA (8th ed.)

Karam, Jean Michel. Micromachining and Microfabrication Process Technology VI. SPIE Digital Library.

Atenció: Aquestes cites poden no estar 100% correctes.