Micro-Opto-Electro-Mechanical Systems
| Awduron Eraill: | Syms, Richard |
|---|---|
| Fformat: | Electronig Llyfr |
| Iaith: | English |
| Cyhoeddwyd: |
SPIE Digital Library,
9/1/00
|
| Pynciau: | |
| Mynediad Ar-lein: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
Eitemau Tebyg
-
MOEMS: Micro-Opto-Electro-Mechanical Systems
gan: Motamedi, Manouchehr
Cyhoeddwyd: (2009) -
MOEMS: Micro-Opto-Electro-Mechanical Systems
gan: Motamedi, Manouchehr - Functional Integration of Opto-Electro-Mechanical Devices and Systems
- Functional Integration of Opto-Electro-Mechanical Devices and Systems II
- Micro Electro Mechanical Systems, IEEE International Conference on