Micro-Opto-Electro-Mechanical Systems
| Beste egile batzuk: | Syms, Richard |
|---|---|
| Formatua: | Baliabide elektronikoa Liburua |
| Hizkuntza: | English |
| Argitaratua: |
SPIE Digital Library,
9/1/00
|
| Gaiak: | |
| Sarrera elektronikoa: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
Antzeko izenburuak
-
MOEMS: Micro-Opto-Electro-Mechanical Systems
nork: Motamedi, Manouchehr
Argitaratua: (2009) -
MOEMS: Micro-Opto-Electro-Mechanical Systems
nork: Motamedi, Manouchehr - Functional Integration of Opto-Electro-Mechanical Devices and Systems
- Functional Integration of Opto-Electro-Mechanical Devices and Systems II
- Micro Electro Mechanical Systems, IEEE International Conference on