Smith, J. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
Cita Chicago (17th ed.)Smith, James. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
Cita MLA (8th ed.)Smith, James. Micromachining and Microfabrication Process Technology V. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.