Ehrfeld, W. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
Cita Chicago (17th ed.)Ehrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
Cita MLA (8th ed.)Ehrfeld, Wolfgang. Design, Test, and Microfabrication of MEMS and MOEMS. SPIE Digital Library.
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