Singh, B. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.
Chicagoスタイル(17版)引用形式Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.
MLA(8版)引用形式Singh, Bhanwar. Metrology, Inspection, and Process Control for Microlithography XIII. SPIE Digital Library.
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