Aizaki, N. Photomask and X-Ray Mask Technology V. SPIE Digital Library.
Cita Chicago (17th ed.)Aizaki, Naoaki. Photomask and X-Ray Mask Technology V. SPIE Digital Library.
Cita MLA (8th ed.)Aizaki, Naoaki. Photomask and X-Ray Mask Technology V. SPIE Digital Library.
Atenció: Aquestes cites poden no estar 100% correctes.