Metrology, Inspection, and Process Control for Microlithography XII
| Beste egile batzuk: | |
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| Formatua: | Baliabide elektronikoa Liburua |
| Hizkuntza: | English |
| Argitaratua: |
SPIE Digital Library,
6/8/98
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| Gaiak: | |
| Sarrera elektronikoa: | Full text available on Research4Life (SPIE Digital Library) |
| Classic Catalogue: | View this record in Classic Catalogue |
| Alearen deskribapena: | <strong>On-Campus Access Only (IP based access)</strong> |
|---|---|
| Deskribapen fisikoa: | 1 online resource |
| Formatua: | Mode of access: Internet |
| ISBN: | 9780819427779 |
| Sartu: | Electronic access restricted to authorized BRAC University faculty, staff and students |