DeBusk, D. In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing. SPIE Digital Library.
Chicago-Zitierstil (17. Ausg.)DeBusk, Damon. In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing. SPIE Digital Library.
MLA-Zitierstil (8. Ausg.)DeBusk, Damon. In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing. SPIE Digital Library.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.