Yoon, S. F. Microlithographic Techniques in IC Fabrication. SPIE Digital Library.
Cita Chicago (17th ed.)Yoon, Soon Fatt. Microlithographic Techniques in IC Fabrication. SPIE Digital Library.
Cita MLA (8th ed.)Yoon, Soon Fatt. Microlithographic Techniques in IC Fabrication. SPIE Digital Library.
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