Shelden, G. 16th Annual BACUS Symposium on Photomask Technology and Management. SPIE Digital Library.
Cita Chicago (17th ed.)Shelden, Gilbert. 16th Annual BACUS Symposium on Photomask Technology and Management. SPIE Digital Library.
Cita MLA (8th ed.)Shelden, Gilbert. 16th Annual BACUS Symposium on Photomask Technology and Management. SPIE Digital Library.
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