Somervell, M. Advances in Resist Materials and Processing Technology XXIX. SPIE Digital Library.
Cita Chicago (17th ed.)Somervell, Mark. Advances in Resist Materials and Processing Technology XXIX. SPIE Digital Library.
Cita MLA (8th ed.)Somervell, Mark. Advances in Resist Materials and Processing Technology XXIX. SPIE Digital Library.
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