APA ציטוט

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.

ציטוט MLA

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVI. SPIE Digital Library.