APA (7th ed.) Citation

Dusa, M. Optical Microlithography XXIV. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Dusa, Mircea. Optical Microlithography XXIV. SPIE Digital Library.

MLA (8th ed.) Citation

Dusa, Mircea. Optical Microlithography XXIV. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.