APA (7th ed.) Citation

Kato, K. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

MLA (8th ed.) Citation

Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XX. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.