Zhang, Y. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.
Chicago Style (17. basım) AtıfZhang, Ying. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.
MLA (8th ed.) AtıfZhang, Ying. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.
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