APA (7th ed.) Citation

Zhang, Y. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.

Chicago Style (17th ed.) Citation

Zhang, Ying. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.

MLA (8th ed.) Citation

Zhang, Ying. Advanced Etch Technology for Nanopatterning II. SPIE Digital Library.

Warning: These citations may not always be 100% accurate.