Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.
Chicago Style (17. basım) AtıfStarikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.
MLA (8th ed.) AtıfStarikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.
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