APA (7. basım) Alıntı

Starikov, A. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

Chicago Style (17. basım) Atıf

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

MLA (8th ed.) Atıf

Starikov, Alexander. Metrology, Inspection, and Process Control for Microlithography XXVII. SPIE Digital Library.

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