Maher, M. A. Micromachining and Microfabrication Process Technology XVIII. SPIE Digital Library.
Cita Chicago (17th ed.)Maher, Mary Ann. Micromachining and Microfabrication Process Technology XVIII. SPIE Digital Library.
Cita MLA (8th ed.)Maher, Mary Ann. Micromachining and Microfabrication Process Technology XVIII. SPIE Digital Library.
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