Kato, K. Photomask and Next-Generation Lithography Mask Technology XIX. SPIE Digital Library.
Citazione stile Chigago Style (17a edizione)Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XIX. SPIE Digital Library.
Citatione MLA (8a ed.)Kato, Kokoro. Photomask and Next-Generation Lithography Mask Technology XIX. SPIE Digital Library.
Attenzione: Queste citazioni potrebbero non essere precise al 100%.