Maher, M. A. Micromachining and Microfabrication Process Technology XIX. SPIE Digital Library.
Chicago Style aipamenaMaher, Mary Ann. Micromachining and Microfabrication Process Technology XIX. SPIE Digital Library.
MLA aipamenaMaher, Mary Ann. Micromachining and Microfabrication Process Technology XIX. SPIE Digital Library.
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